Title:
A manufacturing method of a SiC single crystal
Document Type and Number:
Japanese Patent JP6090287
Kind Code:
B2
Inventors:
Katsunori Tanno
Application Number:
JP2014223796A
Publication Date:
March 08, 2017
Filing Date:
October 31, 2014
Export Citation:
Assignee:
TOYOTA JIDOSHA KABUSHIKI KAISHA
International Classes:
C30B29/36
Domestic Patent References:
JP2009167047A |
Foreign References:
WO2014103394A1 |
Attorney, Agent or Firm:
Atsushi Aoki
Takashi Ishida
Tetsuji Koga
Nobuo Sekine
Masaharu Konoue
Takashi Ishida
Tetsuji Koga
Nobuo Sekine
Masaharu Konoue