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Title:
酸拡散制御剤、感放射線性樹脂組成物、レジストパターン形成方法、化合物及び化合物の製造方法
Document Type and Number:
Japanese Patent JPWO2013172239
Kind Code:
A
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Inventors:
Namai Semi- person
Norihiko Ikeda
Application Number:
JP2013062981
Publication Date:
January 12, 2016
Filing Date:
May 08, 2013
Export Citation:
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Assignee:
JSR, Inc.
International Classes:
C07D307/94; G03F7/038; C07D295/14; C07D307/93; G03F7/004; C07D215/06; C07D327/04; C07D493/10; C07D317/30; G03F7/039; C07H9/04; C07C227/08; C07C229/12; C07D211/14
Attorney, Agent or Firm:
Kazuki Amano



 
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