A manufacturing method of an ammonium salt compound, and a manufacturing method of an acid generator

Title:

A manufacturing method of an ammonium salt compound, and a manufacturing method of an acid generator

Document Type and Number:

Japanese Patent JP6037689

Kind Code:

B2

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Inventors:

Masatoshi Arai
Yoshiyuki Utsumi

Application Number:

JP2012155039A

Publication Date:

December 07, 2016

Filing Date:

July 10, 2012

Export Citation:

Assignee:

Tokyo Ohka Kogyo Co., Ltd.

International Classes:

C07C303/32; C07C309/17; C07C381/12; C07D327/04

Domestic Patent References:

Attorney, Agent or Firm:

Sumio Tanai
Masatake Shiga
Suzuki Mitsuyoshi
Mitsunaga Igarashi

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