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Title:
A manufacturing method of coating liquid for metal oxide thin film formation, and a metal oxide thin film, and a manufacturing method of an electric field effect type transistor
Document Type and Number:
Japanese Patent JP6064314
Kind Code:
B2
Abstract:
A coating liquid for forming a metal oxide thin film, the coating liquid including: an inorganic indium compound; at least one of an inorganic magnesium compound and an inorganic zinc compound; and a glycol ether.

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Inventors:
Yuki Nakamura
Naoyuki Ueda
Yukiko Abe
Yuji Sone
Application Number:
JP2011251495A
Publication Date:
January 25, 2017
Filing Date:
November 17, 2011
Export Citation:
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Assignee:
株式会社リコー
International Classes:
H01L21/368; C01G15/00; H01L21/336; H01L29/786
Domestic Patent References:
JP2010258058A
JP2010225287A
JP2012527402A
JP2009177149A
Foreign References:
WO2010135667A1
Attorney, Agent or Firm:
Koichi Hirota



 
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