Title:
MICROMACHINING TECHNOLOGY-BASED DEVICE FOR PROJECTING IMAGE AND ANALYZING OPTICAL SPECTRUM, AND MANUFACTURING METHOD THEREFOR
Document Type and Number:
Japanese Patent JP2017010006
Kind Code:
A
Abstract:
PROBLEM TO BE SOLVED: To provide a micromachining technology-based device for projecting an image and analyzing an optical spectrum, and a manufacturing method therefor.SOLUTION: A device includes; a first light supply unit 121 capable of providing a first light beam 123 to the device 110; an optical diffraction unit 130 configured to diffract the first light beam 123 supplied to the device 110 according to an adjustable diffraction property thereof; a second light supply unit 122 capable of supplying a second light beam 124 to the device 110; a first micromirror 140 capable of variably deflecting the second light beam 124 supplied to the device 110 according to a position and/or an orientation thereof; and a first actuator 135 capable of adjusting the adjustable diffraction property of the optical diffraction unit 130 as well as the position and/or orientation of the first micromirror 140.SELECTED DRAWING: Figure 2
Inventors:
SOLF CHRISTIAN
Application Number:
JP2016091254A
Publication Date:
January 12, 2017
Filing Date:
April 28, 2016
Export Citation:
Assignee:
BOSCH GMBH ROBERT
International Classes:
G02B26/08; B81B3/00; B81C1/00
Attorney, Agent or Firm:
Einzel Felix-Reinhard
Junichi Maekawa
Hiroyasu Ninomiya
Ueshima
Junichi Maekawa
Hiroyasu Ninomiya
Ueshima