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Title:
DIAMOND LIKE CARBON FILM, SLIDING MEMBER, PROCESSING MEMBER, AND METHOD FOR MANUFACTURING DIAMOND LIKE CARBON FILM
Document Type and Number:
Japanese Patent JP2017160538
Kind Code:
A
Abstract:
PROBLEM TO BE SOLVED: To provide: a diamond like carbon film; a sliding member; a processing member; and a method for manufacturing the diamond like carbon film.SOLUTION: A diamond like carbon film 14 includes carbon and chlorine; the slide member has the diamond like carbon film in a sliding portion contacting an opposite material; and the processing member has the diamond like carbon film in a processing portion contacting a member to be processed. For example, the diamond like carbon film including carbon and chlorine is manufactured on a base material 10 by a chemical vapor phase deposition method using a gas including chlorine, a gas including carbon or a gas including chlorine and carbon as a raw material gas.SELECTED DRAWING: Figure 2

Inventors:
TOKUDA YUKI
KAWAGUCHI MASAHIRO
ITO TAKASHI
SHIOSAKI TAKAHIKO
Application Number:
JP2017040986A
Publication Date:
September 14, 2017
Filing Date:
March 03, 2017
Export Citation:
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Assignee:
TOKYO METRO IND TECH RES INST
FUJI METAL CO LTD
International Classes:
C23C16/27; B23B27/14; B23B27/20; B24D3/00; C01B32/20
Domestic Patent References:
JP2007136611A2007-06-07
JP2006326690A2006-12-07
JPH03240957A1991-10-28
JPH04229277A1992-08-18
JP2011122226A2011-06-23
Attorney, Agent or Firm:
Atsushi Nakajima
Kato Kazunori
Hiroshi Fukuda



 
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