Title:
硫黄を共添加したチタニアドープ石英ガラス部材の製造方法
Document Type and Number:
Japanese Patent JP5549525
Kind Code:
B2
Abstract:
A titania and sulfur co-doped quartz glass member is provided. Due to co-doping of titania and sulfur, the quartz glass member undergoes zero expansion at a certain temperature and low thermal expansion over a wide temperature range, and is thus suited for use in a commercial EUV lithography tool. A manufacturing method and an optical member for EUV lithography are also provided.
Inventors:
Shigeru Maida
Hisatoshi Otsuka
Hisatoshi Otsuka
Application Number:
JP2010234269A
Publication Date:
July 16, 2014
Filing Date:
October 19, 2010
Export Citation:
Assignee:
Shin-Etsu Chemical Co., Ltd.
International Classes:
C03B20/00; C03C3/06; G02B1/00; G03F1/22; G03F1/24; G03F1/60; H01L21/027
Attorney, Agent or Firm:
Takashi Kojima
Saori Shigematsu
Katsunari Kobayashi
Takeshi Ishikawa
Saori Shigematsu
Katsunari Kobayashi
Takeshi Ishikawa