Title:
MANUFACTURING METHOD FOR LIQUID DISCHARGE HEAD
Document Type and Number:
Japanese Patent JP2018108691
Kind Code:
A
Abstract:
PROBLEM TO BE SOLVED: To provide a liquid discharge head which is capable of stably maintaining an orifice plate surface with respect to various kinds of inks even when having an inorganic nozzle partially using an organic material and has a good wiping property.SOLUTION: A manufacturing method for a liquid discharge head includes: a process for forming each flow path mold material on a substrate having an energy generating element; a process for forming a film of a first inorganic material with a film thickness which covers the flow path mold material and does not fill all the gaps between the flow path mold materials; a process for forming a resin material layer on the first inorganic material film and filling the remaining gaps between the flow path mold materials; a process for polishing the film of the first inorganic material and the resin material layer until the surface of each flow path mold material is exposed; a process for forming a film of a second inorganic material on a polishing surface and forming a discharge port in the film of the second inorganic material; and a process for removing at least a part of each flow path mold material and forming a flow path communicated with the discharge port.SELECTED DRAWING: Figure 1
Inventors:
TAKEUCHI SOTA
KOMURO HIROKAZU
NAGAMOCHI SOICHIRO
KOMURO HIROKAZU
NAGAMOCHI SOICHIRO
Application Number:
JP2017000191A
Publication Date:
July 12, 2018
Filing Date:
January 04, 2017
Export Citation:
Assignee:
CANON KK
International Classes:
B41J2/16; B41J2/14; B41J2/165
Attorney, Agent or Firm:
Akio Miyazaki
Masaaki Ogata
Masaaki Ogata