Title:
The manufacturing method of fluoridation carbon and fluoridation carbon, and its use
Document Type and Number:
Japanese Patent JP6088371
Kind Code:
B2
Abstract:
A fluorocarbon including fluorine and carbon in which d50 in a cumulative particle size distribution is 1.0 nm or greater and 4.0 nm or less. A method for producing the fluorocarbon includes a plasma treatment process of generating radicals by producing inductively coupled plasma (ICP) using a fluorocarbon gas.
Inventors:
Toshiyuki Ogata
Yasuo Suzuki
Atsushi Matsushita
Tatsuhiro Mitake
Yasuo Suzuki
Atsushi Matsushita
Tatsuhiro Mitake
Application Number:
JP2013139165A
Publication Date:
March 01, 2017
Filing Date:
July 02, 2013
Export Citation:
Assignee:
Tokyo Ohka Kogyo Co., Ltd.
International Classes:
C01B32/15; C01B32/18; C01B32/182; C07C17/00; C07C19/08; C07C21/18; C23C16/30
Domestic Patent References:
| JP2007254246A | ||||
| JP6340962A | ||||
| JP2000070836A |
Foreign References:
| WO2012176607A1 |
Attorney, Agent or Firm:
Harakenzo world patent & trademark