Title:
The manufacturing method of a functional element, and a functional element
Document Type and Number:
Japanese Patent JP6221320
Kind Code:
B2
Abstract:
PROBLEM TO BE SOLVED: To provide a method of manufacturing a functional element in which a functional layer can be formed with a high definition pattern.SOLUTION: A method of manufacturing a functional element comprises: a lamination step of laminating a laser absorption layer for absorbing laser light, and a liquid-repellent layer transmitting the laser light and having liquid repellency higher than that of the laser absorption layer; a liquid-repellent layer patterning step of exposing the laser absorption layer by irradiating the laser absorption layer with laser light in pattern from the liquid-repellent layer side, and removing the liquid-repellent layer in pattern by laser ablation; and a functional layer formation step of forming a functional layer by coating the laser absorption layer in the opening of the liquid-repellent layer with a coating liquid for forming a functional layer.
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Inventors:
Shusuke Kanazawa
Application Number:
JP2013085963A
Publication Date:
November 01, 2017
Filing Date:
April 16, 2013
Export Citation:
Assignee:
Dai Nippon Printing Co.,Ltd.
International Classes:
H01L21/336; B05D3/06; G03F7/095; G03F7/36; G03F7/38; H01L21/28; H01L29/786; H01L51/40; H01L51/50; H05B33/10; H05B33/26
Domestic Patent References:
| JP2006163418A | ||||
| JP2013016773A | ||||
| JP2011216647A | ||||
| JP2005251809A | ||||
| JP2004508971A |
Foreign References:
| US20020034707 | ||||
| US20110244639 |
Attorney, Agent or Firm:
Akihiko Yamashita
Kishimoto Tatsuto
Kishimoto Tatsuto
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