Title:
A manufacturing method of a gas cell
Document Type and Number:
Japanese Patent JP6115359
Kind Code:
B2
Abstract:
PROBLEM TO BE SOLVED: To provide a method of manufacturing a gas cell in which transpiration of the sealed metal is suppressed.SOLUTION: A method of manufacturing a gas cell includes: a step for preparing metal, a base substrate having a bottomed hole opened to a first surface and a substrate for sealing; a step for overlapping the sealing substrate on the first substrate so as to enclose the metal in a hole; a first joining step for having a sealing region surrounding an opening and a joining region surrounding the sealing region and heating and joining the base substrate and the sealing substrate in the joining region; and a second joining step for heating and joining the base substrate and the sealing substrate in the sealing region and sealing the hole.
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Inventors:
Koji Kodo
Application Number:
JP2013139527A
Publication Date:
April 19, 2017
Filing Date:
July 03, 2013
Export Citation:
Assignee:
Seiko Epson Corporation
International Classes:
H01S1/06; H03L7/26
Domestic Patent References:
| JP2013038382A | ||||
| JP2007178274A | ||||
| JP2001067589A | ||||
| JP2013125907A | ||||
| JP2009283526A |
Attorney, Agent or Firm:
Tatsuya Masuda
Kazuo Asahi
Kazuaki Watanabe
Kazuo Asahi
Kazuaki Watanabe