Title:
A manufacturing method of heat treatment equipment and a sheet-shaped substrate
Document Type and Number:
Japanese Patent JP5928317
Kind Code:
B2
Inventors:
Shinsaku Nagano
Takashi Kobayashi
Takashi Kobayashi
Application Number:
JP2012260384A
Publication Date:
June 01, 2016
Filing Date:
November 28, 2012
Export Citation:
Assignee:
Sumitomo Metal Mining Co., Ltd.
International Classes:
B65H23/038; B65H20/12; B65H23/24
Domestic Patent References:
| JP20023035A | ||||
| JP20121793A | ||||
| JP200246910A | ||||
| JP2013245027A |
Foreign References:
| US3216638 |
Attorney, Agent or Firm:
Tadashige Ito
Tadahiko Ito
Tadahiko Ito