Title:
A manufacturing method and an inspection method for the same of a detailed electret pattern
Document Type and Number:
Japanese Patent JP6140961
Kind Code:
B2
Inventors:
Sakai Atsuo
Satoshi Shimizu
Susumu Kawato
Satoshi Shimizu
Susumu Kawato
Application Number:
JP2012211264A
Publication Date:
June 07, 2017
Filing Date:
September 25, 2012
Export Citation:
Assignee:
Toho Kasei Co., Ltd.
International Classes:
H01G7/02; H02N1/00; H04R19/01; H04R19/04
Domestic Patent References:
| JP1161370A | ||||
| JP2008112781A | ||||
| JP2012502493A | ||||
| JP50067998A | ||||
| JP62087218A | ||||
| JP4075483A | ||||
| JP9007241A | ||||
| JP2012138514A | ||||
| JP52000398A | ||||
| JP51142699A |
Foreign References:
| WO2010032759A1 |
Attorney, Agent or Firm:
Ikeuchi, Sato & Partners