Title:
Manufacturing method of bumped membrane sheet for probe card, probe card and bumped membrane sheet for probe card
Document Type and Number:
Japanese Patent JP6333225
Kind Code:
B2
Inventors:
Toshio Tako
Masaaki Ishizaka
Masaaki Ishizaka
Application Number:
JP2015188941A
Publication Date:
May 30, 2018
Filing Date:
September 25, 2015
Export Citation:
Assignee:
L-Fino Note Technology Co., Ltd.
International Classes:
G01R1/073; H01L21/66
Domestic Patent References:
| JP2008089378A | ||||
| JP2011237398A | ||||
| JP2011237391A | ||||
| JP2011054630A |
Attorney, Agent or Firm:
Keiro Shibuya