Title:
A manufacturing method of a mold provided with a high contrast position Matching mark
Document Type and Number:
Japanese Patent JP6278383
Kind Code:
B2
Inventors:
Kenta Suzuki
Hiroshi Hiroshima
Hiroshi Hiroshima
Application Number:
JP2013220816A
Publication Date:
February 14, 2018
Filing Date:
October 24, 2013
Export Citation:
Assignee:
National Institute of Advanced Industrial Science and Technology
International Classes:
H01L21/027; B29C59/02; G03F9/00
Domestic Patent References:
| JP2013519236A | ||||
| JP2003257973A | ||||
| JP2013021153A | ||||
| JP2007103915A | ||||
| JP2007059926A | ||||
| JP11008207A | ||||
| JP6021052A |
Foreign References:
| WO2009034926A1 |