Title:
A manufacturing method of a nano micro projection object
Document Type and Number:
Japanese Patent JP6131437
Kind Code:
B2
Inventors:
Shunichiro Tanaka
Ryutaro Abe
Ryutaro Abe
Application Number:
JP2012188269A
Publication Date:
May 24, 2017
Filing Date:
August 29, 2012
Export Citation:
Assignee:
Tohoku University
International Classes:
B82B3/00; B01D53/86; B82Y40/00; C22C9/00; C22C38/00; H01J1/304; H01J9/02
Domestic Patent References:
| JP2012157825A | ||||
| JP2008094686A | ||||
| JP2009187739A | ||||
| JP2011056638A | ||||
| JP2005262373A | ||||
| JP2015168591A | ||||
| JP2013173112A | ||||
| JP2012223842A |
Foreign References:
| WO2014021072A1 |