Title:
A manufacturing method of a photoelectric conversion device
Document Type and Number:
Japanese Patent JP6162592
Kind Code:
B2
Abstract:
PROBLEM TO BE SOLVED: To provide a photoelectric conversion device of high photoelectric conversion efficiency.SOLUTION: A manufacturing method of a photoelectric conversion device 11 includes: a first step of preparing a source solution dissolving a metal complex orienting an organic chalcogen compound to a metal element in an organic solvent; a second step of forming a first coating 3x by applying the source solution onto an electrode layer 2 and then forming a first thermal decomposition film 3a by heating the first coating 3x at a first temperature; a third step of creating a laminate of first thermal decomposition films 3a and 3b on the electrode layer 2 by repeating the second step once or more; a fourth step of forming a second coating 3z by applying the source solution onto the laminate and then forming a second thermal decomposition film 3c by heating the second coating 3z at a second temperature higher than the first temperature; and a fifth step of creating a semiconductor layer 3 containing a metal chalcogenide by heating the laminate and the second thermal decomposition film 3c in an atmosphere containing a chalcogen element.
Inventors:
Seiichiro Inai
Kei Kato
Rough waves sequentially
Kei Kato
Rough waves sequentially
Application Number:
JP2013256253A
Publication Date:
July 12, 2017
Filing Date:
December 11, 2013
Export Citation:
Assignee:
Kyocera Corporation
International Classes:
H01L31/0749; H01L31/18
Domestic Patent References:
| JP2013236044A | ||||
| JP2013207061A |
Foreign References:
| WO2011040272A1 | ||||
| US4684761 |