A manufacturing method of a piezo-electric vibration portion article

Title:

A manufacturing method of a piezo-electric vibration portion article

Document Type and Number:

Japanese Patent JP6191787

Kind Code:

B2

Abstract:

A lid and an insulating bonding layer that seal a piezoelectric vibrator on a substrate are bonded with higher strength. A piezoelectric vibration component includes a substrate having a principal surface on which a piezoelectric vibrator is mounted, an insulating film disposed on the principal surface, a lid having a recess opening toward the principal surface and an edge portion around the recess. Moreover, first and second insulating bonding layers are interposed between the lid and the substrate. The first and second insulating bonding layers are joined together between the edge portion and the insulating film so as to seal the piezoelectric vibrator in a space between the recess and the principal surface.

Inventors:

Kazuyuki Noto
Keiichi Kami
Hidekazu Oishibashi

Application Number:

JP2016568275A

Publication Date:

September 06, 2017

Filing Date:

September 08, 2015

Export Citation:

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