Title:
A manufacturing method of a piezoelectric element
Document Type and Number:
Japanese Patent JP6055273
Kind Code:
B2
Abstract:
PROBLEM TO BE SOLVED: To provide a method of manufacturing a piezoelectric element in which the characteristics can be improved by eliminating the influence of alignment error of an outline pattern and a groove pattern.SOLUTION: The outline and groove 13a of a vibration arm 12a are formed simultaneously by etching a substrate 41 using a first mask 43 covering a vibration part enlarged region 42 including the outline of a vibration arm 12a, and then further etching the substrate 41 by using a second mask 45 covering a region 44 becoming the vibration arm 12a excepting the groove 13a.
Inventors:
Shigeru Kizaki
Shinichi Morishima
Shinichi Morishima
Application Number:
JP2012239816A
Publication Date:
December 27, 2016
Filing Date:
October 31, 2012
Export Citation:
Assignee:
Kyocera Crystal Device Co., Ltd.
International Classes:
H03H3/02; H01L41/09; H01L41/18
Domestic Patent References:
| JP2004159072A | ||||
| JP7212161A | ||||
| JP2012085278A | ||||
| JP2004120351A |
Attorney, Agent or Firm:
Isamu Takahashi