Title:
A manufacturing method of a piezoelectric element and a piezoelectric element
Document Type and Number:
Japanese Patent JP6094075
Kind Code:
B2
Abstract:
PROBLEM TO BE SOLVED: To provide a piezoelectric device that has corrected malfunctions in a manufacturing process, and to provide a method for manufacturing the piezoelectric device.SOLUTION: A method for manufacturing a piezoelectric device includes the steps of: preparing a plurality of green sheets for piezoelectric layers each having electrode patterns, corresponding to respective electrodes 20, 30, and 40, formed therein; obtaining a green sheet laminate on a surface of which the electrode patterns corresponding to the respective electrodes 20 and 30 are arranged, by laminating the plurality of green sheets for piezoelectric layers as prepared; pressurizing the green sheet laminate as obtained with a warm isostatic press; and baking the green sheet laminate as pressed.
Inventors:
Kazushi Tatemoto
Yuzo Komatsu
Itakura Keisuke
Seishi Sasaki
Yuzo Komatsu
Itakura Keisuke
Seishi Sasaki
Application Number:
JP2012154592A
Publication Date:
March 15, 2017
Filing Date:
July 10, 2012
Export Citation:
Assignee:
tdk Corporation
International Classes:
H01L41/047; H01L41/29; H01L41/312
Domestic Patent References:
| JP2006073672A | ||||
| JP11195554A | ||||
| JP2009188261A | ||||
| JP2010092900A | ||||
| JP2012085456A |
Attorney, Agent or Firm:
Yoshiki Hasegawa
Yoshiki Kuroki
Takashi Mikami
Yoshiki Kuroki
Takashi Mikami