A manufacturing method of a piezoelectric sensor

Title:

A manufacturing method of a piezoelectric sensor

Document Type and Number:

Japanese Patent JP6052434

Kind Code:

B2

Abstract:

A sheet-like flexible printed substrate (3) having a copper foil (50) affixed to the entirety of one main surface thereof is prepared (S1). Conductor patterns are formed (S2) on the one main surface of the flexible printed substrate (3). The flexible printed substrate (3) is stamped with a press die, and a flexible printed substrate (30) is formed (S3). A conductive adhesive is used to affix (S4) a piezoelectric film (31) to the top of a first detection electrode (34) of a substrate section (36). The substrate section (36) in a state of having had the piezoelectric film (31) affixed to the top of the first detection electrode (34) thereof is pressed (S5). A substrate section (37) is folded back, the conductive adhesive is used to affix a second detection electrode (35) to the piezoelectric film (31), and the piezoelectric film (31) is sandwiched (S6) between the first detection electrode (34) and the second detection electrode (35). A pushing element (17) is attached (S8) to a sensor unit (16). The pushing element (17) and the sensor unit (16) in a state in which the piezoelectric film (31) is being sandwiched are pressed (S9).

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Inventors:

Hideki Kawamura
Hiroyuki Nakaji
Yoshihiro Yamaguchi
Jun Endo
Makoto Saito

Application Number:

JP2015554818A

Publication Date:

December 27, 2016

Filing Date:

December 19, 2014

Export Citation:

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Assignee:

MURATA MANUFACTURING CO.,LTD.

International Classes:

G01L1/16; H01L41/113; H01L41/193; H01L41/29; H01L41/31; H01L41/33; H01L41/45

Domestic Patent References:

JP2009080090A	2009-04-16
JPH0280930A	1990-03-22
JP2009053109A	2009-03-12
JP2008122215A	2008-05-29
JP2009080090A	2009-04-16
JPH0280930A	1990-03-22
JP2009053109A	2009-03-12

Foreign References:

WO2011138903A1	2011-11-10
US20020036446A1	2002-03-28
WO2011138903A1	2011-11-10

Attorney, Agent or Firm:

Kaede International Patent Office

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