A manufacturing method of a polishing pad and a polishing pad

Title:

A manufacturing method of a polishing pad and a polishing pad

Document Type and Number:

Japanese Patent JP6163414

Kind Code:

B2

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Inventors:

Mitsuru Kato
Hirofumi Kikuchi
Tomotaka Okamoto
Shinya Kato
Kiyooka Junto
Junichi Taniguchi

Application Number:

JP2013244215A

Publication Date:

July 12, 2017

Filing Date:

November 26, 2013

Export Citation:

Assignee:

KURARAY CO.,LTD.

International Classes:

B24B37/24; B24B37/22; B32B5/02; C08J5/14; D04H1/542; H01L21/304

Domestic Patent References:

JP2008207323A
JP2012045690A

Attorney, Agent or Firm:

Masaru Egawa
Shinichi Kawasaki

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