Title:
A manufacturing method of a porous high polymer film, and a porous high polymer film
Document Type and Number:
Japanese Patent JP6044895
Kind Code:
B2
Abstract:
Disclosed is a method for producing a porous polymer film. This method includes the steps of: (I) irradiating a polymer film with an ion beam of accelerated ions so as to form a polymer film that has collided with the ions in the beam; and (II) chemically etching the polymer film formed in the step (I) so as to form openings and/or through holes corresponding to tracks of the colliding ions left in the polymer film. In the step (I), the polymer film is placed in an atmosphere with a pressure of 100 Pa or more, and the polymer film placed in the atmosphere is irradiated with the ion beam that has passed through a beam line maintained at a lower pressure than the pressure of the atmosphere and through a pressure barrier sheet disposed at an end of the beam line to separate the beam line from the atmosphere.
Inventors:
Ryo Furuyama
Junichi Moriyama
Yozo Nagai
Yusuke Yosuke
Ikuo Ishibori
Takahiro Yuyama
Tomohisa Ishizaka
Susumu Okumura
Yasunari Maekawa
Hiroshi Koshikawa
Tetsuya Yamaki
Asano Masaharu
Junichi Moriyama
Yozo Nagai
Yusuke Yosuke
Ikuo Ishibori
Takahiro Yuyama
Tomohisa Ishizaka
Susumu Okumura
Yasunari Maekawa
Hiroshi Koshikawa
Tetsuya Yamaki
Asano Masaharu
Application Number:
JP2013067306A
Publication Date:
December 14, 2016
Filing Date:
March 27, 2013
Export Citation:
Assignee:
NITTO DENKO CORPORATION
Japan Atomic Energy Agency
Japan Atomic Energy Agency
International Classes:
C08J9/36; C08J9/00; G21K5/00; G21K5/04; G21K5/10
Domestic Patent References:
| JP46005680B1 | ||||
| JP1500577A | ||||
| JP2002341097A | ||||
| JP2008068275A | ||||
| JP2009142871A | ||||
| JP5051479A | ||||
| JP2005305444A | ||||
| JP2011184626A | ||||
| JP2004058415A | ||||
| JP63154750A |
Foreign References:
| US4956219 | ||||
| US3612871 | ||||
| US4832997 |
Attorney, Agent or Firm:
Koichi Kamata