A manufacturing method of a reflective mask, and a manufacture device of a reflective mask

Title:

A manufacturing method of a reflective mask, and a manufacture device of a reflective mask

Document Type and Number:

Japanese Patent JP6226517

Kind Code:

B2

Inventors:

Daiaki Yoshimori
Yoshihisa Kase
Ieyanagi Makoto
Goji Motokawa
Tokuhisa Oiwa

Application Number:

JP2012199842A

Publication Date:

November 08, 2017

Filing Date:

September 11, 2012

Export Citation:

Assignee:

Shibaura Mechatronics Co., Ltd.

International Classes:

G03F1/24; G03F1/80

Domestic Patent References:

Foreign References:

WO2009136564A1

Attorney, Agent or Firm:

Masahiko Hinataji

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