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Title:
A manufacturing method of a resist composition and a resist pattern
Document Type and Number:
Japanese Patent JP6167544
Kind Code:
B2
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Inventors:
Yamada Airi
Koji Ichikawa
Application Number:
JP2013022051A
Publication Date:
July 26, 2017
Filing Date:
February 07, 2013
Export Citation:
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Assignee:
Sumitomo Chemical Co., Ltd.
International Classes:
G03F7/004; G03F7/039
Domestic Patent References:
JP2008107817A
JP2012006908A
JP2011148766A
JP2011184434A
JP2011190247A
JP2011038092A
JP2011037839A
JP2010150234A
Attorney, Agent or Firm:
Toru Nakayama
Toru Sakamoto



 
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