Title:
Method for manufacturing resist composition and resist pattern
Document Type and Number:
Japanese Patent JP6315748
Kind Code:
B2
Inventors:
Koji Ichikawa
Takayuki Miyagawa
Norifumi Yamaguchi
Takayuki Miyagawa
Norifumi Yamaguchi
Application Number:
JP2013082905A
Publication Date:
April 25, 2018
Filing Date:
April 11, 2013
Export Citation:
Assignee:
Sumitomo Chemical Co., Ltd.
International Classes:
G03F7/038; C08F220/28; G03F7/004; G03F7/039
Domestic Patent References:
| JP2011148766A | ||||
| JP2011190247A | ||||
| JP2013156628A | ||||
| JP2012006908A | ||||
| JP2012041274A | ||||
| JP2011219363A |
Attorney, Agent or Firm:
Shinki Global IP Patent Corporation