A manufacturing method of salt, a resist composition, and a resist pattern

Title:

A manufacturing method of salt, a resist composition, and a resist pattern

Document Type and Number:

Japanese Patent JP5906787

Kind Code:

B2

Inventors:

Norifumi Yamaguchi
Koji Ichikawa

Application Number:

JP2012031375A

Publication Date:

April 20, 2016

Filing Date:

February 16, 2012

Export Citation:

Assignee:

Sumitomo Chemical Co., Ltd.

International Classes:

C07D327/08; G03F7/004; G03F7/039; H01L21/027

Domestic Patent References:

JP2008100988A
JP2009058949A

Foreign References:

KR1020110013869A

Attorney, Agent or Firm:

Toru Nakayama
Toru Sakamoto

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