Title:
A manufacturing method of a semiconductor device, and a semiconductor device
Document Type and Number:
Japanese Patent JP6156883
Kind Code:
B2
Inventors:
Fujio Masuoka
Hiroki Nakamura
Hiroki Nakamura
Application Number:
JP2015021913A
Publication Date:
July 05, 2017
Filing Date:
February 06, 2015
Export Citation:
Assignee:
Unisantis Electronics Singapore Pte Ltd.
International Classes:
H01L21/336; H01L29/78
Domestic Patent References:
| JP10209407A | ||||
| JP2007329480A | ||||
| JP2010272874A | ||||
| JP2009081377A | ||||
| JP2008140996A |
Foreign References:
| US20100232200 | ||||
| WO2009102061A1 | ||||
| US20100216289 |
Attorney, Agent or Firm:
Shinichiro Tanaka
Fumiaki Otsuka
Takaki Nishijima
Hiroyuki Suda
Hiroshi Uesugi
Fumiaki Otsuka
Takaki Nishijima
Hiroyuki Suda
Hiroshi Uesugi
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