Title:
A manufacturing method of silica Titania glass, and a selecting method of silica Titania glass
Document Type and Number:
Japanese Patent JP5992842
Kind Code:
B2
Inventors:
Tetsuji Ueda
Masanobu Ezaki
Shigeru Kaida
Kuri Otsuka
Masanobu Ezaki
Shigeru Kaida
Kuri Otsuka
Application Number:
JP2013011359A
Publication Date:
September 14, 2016
Filing Date:
January 24, 2013
Export Citation:
Assignee:
Shin-Etsu Quartz Products Co., Ltd.
Shin-Etsu Chemical Co., Ltd.
Shin-Etsu Chemical Co., Ltd.
International Classes:
C03B20/00; C03B32/00; C03C3/06; G03F1/60; G03F1/84; H01L21/027
Foreign References:
| WO2004092082A1 |
Attorney, Agent or Firm:
Shinsuke Ishihara
Shoji Ishihara
Shoji Ishihara