Title:
METHOD OF MANUFACTURING SOLAR CELL
Document Type and Number:
Japanese Patent JP2017005253
Kind Code:
A
Abstract:
PROBLEM TO BE SOLVED: To provide a method of manufacturing a solar cell, which enables manufacture of a solar cell having excellent efficiency through formation of a protective film having excellent properties.SOLUTION: A method of manufacturing a solar cell includes forming a protective film using an insulation film over a semiconductor substrate, the semiconductor substrate including a base area formed of crystalline silicon having a first conductive type. The step of forming of the protective film includes a heat treatment process performed at a heat treatment temperature of 600°C or more under a gas atmosphere including a halogen gas, which has a halogen element.SELECTED DRAWING: Figure 1
Inventors:
YANG YOUNGSUNG
KWON HYUNGJIN
KIM CHUNGYI
CHOI JUNGHOON
KWON HYUNGJIN
KIM CHUNGYI
CHOI JUNGHOON
Application Number:
JP2016115912A
Publication Date:
January 05, 2017
Filing Date:
June 10, 2016
Export Citation:
Assignee:
LG ELECTRONICS INC
International Classes:
H01L31/0216; H01L21/316; H01L31/068; H01L31/0747; H01L31/18
Domestic Patent References:
| JP2011222682A | 2011-11-04 | |||
| JP2015015472A | 2015-01-22 | |||
| JP2014519723A | 2014-08-14 | |||
| JPH11102906A | 1999-04-13 | |||
| JP2000068266A | 2000-03-03 | |||
| JP2011249780A | 2011-12-08 | |||
| JP2007053227A | 2007-03-01 |
Foreign References:
| WO2014098987A1 | 2014-06-26 | |||
| US6387827B1 | 2002-05-14 |
Attorney, Agent or Firm:
Atsushi Aoki
Jun Tsuruta
Tomohiro Minamiyama
Akira Kawai
Kenichi Nakamura
Jun Tsuruta
Tomohiro Minamiyama
Akira Kawai
Kenichi Nakamura
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