Title:
トレンチＭＯＳ型炭化珪素半導体装置の製造方法
Document Type and Number:
Japanese Patent JP5556862
Kind Code:
B2
Inventors:
Crossing 崇
Application Number:
JP2012173521A
Publication Date:
July 23, 2014
Filing Date:
August 06, 2012
Export Citation:
Assignee:
Fuji Electric Co., Ltd.
International Classes:
H01L29/78; H01L21/336; H01L29/12
Attorney, Agent or Firm:
Yoichi Matsumoto