Title:
Marks with focusing and tilt correction designs and their alignment methods
Document Type and Number:
Japanese Patent JP6309694
Kind Code:
B2
Abstract:
A marker having a focusing and tilt correction design and an alignment method. The marker includes an alignment marker (20) and at least one pair of focusing markers, wherein the centre of the alignment marker (20) is located on a connection line of any one pair of focusing markers, and the at least one pair of focusing markers is used for focusing and levelling the alignment marker (20) by determining an optimum focal plane position thereof. Also provided is an alignment method for the marker, which implements high-precision focusing and levelling of the alignment marker. The marker provided by the scheme eliminates the influence of tilt on the marker while focusing, thereby improving the measurement reproducibility.
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Inventors:
Do, Ron
Chen, Yufei
Chen, Yufei
Application Number:
JP2017513477A
Publication Date:
April 11, 2018
Filing Date:
September 08, 2015
Export Citation:
Assignee:
Shanghai Micro Electronics Equipment (Group) Company Limited
International Classes:
G03F9/02; G01B11/00
Domestic Patent References:
| JP6196387A | ||||
| JP2004279166A | ||||
| JP2007305696A | ||||
| JP2010098143A |
Attorney, Agent or Firm:
Hiroshi Oue