Title:
A measuring device, a lithography device, and a manufacturing method of an article
Document Type and Number:
Japanese Patent JP5936479
Kind Code:
B2
Abstract:
The measuring apparatus of the present invention is a measuring apparatus that measures a position of an object based on a first phase signal and a second phase signal which are different in phase from each other. The measuring apparatus includes a generator configured to generate a difference signal indicating a difference between a delay time of the first phase signal and a delay time of the second phase signal based on a variation amount of a phase difference between the first phase signal and the second phase signal, which corresponds to a frequency of at least one of the first phase signal and the second phase signal, and the frequency; and a regulator configured to regulate a sampling timing for at least one of the first phase signal and the second phase signal based on the difference signal.
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Inventors:
Yoshiyuki Okada
Application Number:
JP2012172518A
Publication Date:
June 22, 2016
Filing Date:
August 03, 2012
Export Citation:
Assignee:
Canon Inc
International Classes:
G01D5/244; G01D5/347; G03F7/20; H01L21/027
Domestic Patent References:
| JP2008058252A | ||||
| JP11241927A | ||||
| JP2005098735A | ||||
| JP8261794A |
Foreign References:
| WO2007148461A1 |
Attorney, Agent or Firm:
Ryoichi Takaoka
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