A measuring device, a measuring method, and a manufacturing method of an article

Title:

A measuring device, a measuring method, and a manufacturing method of an article

Document Type and Number:

Japanese Patent JP6170385

Kind Code:

B2

Inventors:

Yasushi Iwasaki

Application Number:

JP2013186578A

Publication Date:

July 26, 2017

Filing Date:

September 09, 2013

Export Citation:

Assignee:

Canon Inc

International Classes:

G01B5/20

Domestic Patent References:

Foreign References:

US20050111725
US20110197665

Attorney, Agent or Firm:

Yasunori Otsuka
Shiro Takayanagi
Yasuhiro Otsuka
Shuji Kimura
Osamu Shimoyama
Nagakawa Yukimitsu

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