Title:
MEASURING INSTRUMENT
Document Type and Number:
Japanese Patent JP2022147271
Kind Code:
A
Abstract:
To measure an adhesion strength of a sheet adhered to a ring frame.SOLUTION: A measuring instrument for measuring an adhesion strength of a sheet adhered to a ring frame having an opening part at a center, comprises: a support table that has an annular supporting surface that can support the ring frame; an indenter that presses the sheet adhered to the ring frame mounted on the support table from an upper direction in an inner side of the opening part; a lifting unit that makes the indenter lift and drop to/from the support table; a load measurement part that measures a weight applied to the indenter; and a control unit that controls the lifting unit and the load measurement part. The control unit includes: a measurement control part that controls the lifting unit while measuring the weight applied to the indenter by the load measurement part to press the sheet to the indenter by dropping the indenter to the sheet; and a storage part that stores a measurement result of the load measurement part.SELECTED DRAWING: Figure 2
Inventors:
CHEN YE
KAWASE MASAYUKI
FUJISAWA SHINICHI
KAWASE MASAYUKI
FUJISAWA SHINICHI
Application Number:
JP2021048444A
Publication Date:
October 06, 2022
Filing Date:
March 23, 2021
Export Citation:
Assignee:
DISCO ABRASIVE SYSTEMS LTD
International Classes:
H01L21/301; H01L21/683
Attorney, Agent or Firm:
Matsumoto
Tomohiro Okamoto
Takahiro Kasahara
Hideaki Okamoto
Takayuki Okano
Toshikazu Imato
Tomohiro Okamoto
Takahiro Kasahara
Hideaki Okamoto
Takayuki Okano
Toshikazu Imato
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