Title:
アモルファスカーボン膜を有する部材、及びその製造方法
Document Type and Number:
Japanese Patent JP7456177
Kind Code:
B2
Abstract:
Provided is a member with an amorphous carbon film having sufficient antibacterial properties and a high proportion of sp3 hybridized carbon atoms. The member comprises a substrate and a film formed on the substrate and including amorphous carbon and a metal dispersed in the amorphous carbon, and said film has a first surface in contact with the substrate and a second surface on the opposite side from the first surface. The atomic concentration of the metal in the second surface is lower than the atomic concentration of the metal in the first surface.
Inventors:
Yurai Takahashi
Maki Moriyama
Yusuke Taki
Koichiro Iwahori
Kishiume Engineering
Maki Moriyama
Yusuke Taki
Koichiro Iwahori
Kishiume Engineering
Application Number:
JP2020019588A
Publication Date:
March 27, 2024
Filing Date:
February 07, 2020
Export Citation:
Assignee:
NIKON CORPORATION
International Classes:
A01N59/16; A01N25/08; A01P3/00; C23C14/06
Domestic Patent References:
| JP10110257A |
Foreign References:
| WO2014132923A1 | ||||
| US20030031872 | ||||
| WO2018193991A1 |
Attorney, Agent or Firm:
Kijuro Kawakita
Masahiro Fujita
Masahiro Fujita