Title:
光硬化反応後およびパターン形成後にも接着性を有する感光性接着剤組成物を用いて基板同士を接着する基板の接着方法
Document Type and Number:
Japanese Patent JP5833928
Kind Code:
B2
Inventors:
Masaomi Takano
Namerikawa Shohei
Ken Aoyama
Namerikawa Shohei
Ken Aoyama
Application Number:
JP2011545239A
Publication Date:
December 16, 2015
Filing Date:
December 09, 2010
Export Citation:
Assignee:
Nippon Steel & Sumikin Chemical Co., Ltd.
International Classes:
C09J5/00; C08F299/02; C08G63/676; C09J4/00; C09J11/06; C09J163/00; C09J163/10; G03F7/004; G03F7/027; H01L21/52
Domestic Patent References:
| JPH1022641A | 1998-01-23 | |||
| JP2006003860A | 2006-01-05 | |||
| JPH05339356A | 1993-12-21 | |||
| JP2003176343A | 2003-06-24 |
Attorney, Agent or Firm:
Kazuya Sasaki
Katsuo Naruse
Tomohiro Nakamura
Eiichi Sano
Katsuo Naruse
Tomohiro Nakamura
Eiichi Sano