Title:
ワイヤソーにおける機能障害の検出方法、およびこの方法を実施するための装置
Document Type and Number:
Japanese Patent JP4836682
Kind Code:
B2
Abstract:
A wire layer is formed by winding a wire around multiple wire guides. A support receives an ingot that alternately or continuously moves against the layer of wires through movement of the supports, such that high frequency alternating signal is applied to the layer of wires. A measuring circuit determines the variation in electrical signal directly in the layer of wires. The measured variation is compared with a predetermined threshold. An independent claim is also included for a wire malfunction detection device.
Inventors:
Jean-Marc Rose
Alan Fortei
Alan Fortei
Application Number:
JP2006170907A
Publication Date:
December 14, 2011
Filing Date:
June 21, 2006
Export Citation:
Assignee:
Applied Materials Switzerland S.A.
International Classes:
B24B27/06; B28D5/04; H01L21/304
Domestic Patent References:
| JP10180607A | ||||
| JP7205015A | ||||
| JP2004114249A |
Attorney, Agent or Firm:
Keiichi Ota