Title:
A method and a device for substrate conveyance and radical confinement
Document Type and Number:
Japanese Patent JP6054314
Kind Code:
B2
Abstract:
Examples of the present invention provide an apparatus for transferring substrates and confining a processing environment in a chamber. One example provides a hoop assembly for use in a processing chamber. The hoop assembly includes a confinement ring defining a confinement region therein. A hoop body mates with the confinement ring. The hoop body is slanted to reduce a thickness across a diameter of the hoop body. Three or more lifting fingers are attached to the hoop body and extend downwards. Each of the three or more lifting fingers has a contact tip positioned radially inward from the hoop body to form a substrate support surface below and spaced apart from the confinement region.
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Inventors:
Lee Jared Ahmad
Salinas Martin Jeff
Luther Paul Bee
Youth Imad
Pal Anirudda
Salinas Martin Jeff
Luther Paul Bee
Youth Imad
Pal Anirudda
Application Number:
JP2013556824A
Publication Date:
December 27, 2016
Filing Date:
February 29, 2012
Export Citation:
Assignee:
APPLIED MATERIALS,INCORPORATED
International Classes:
H01L21/677; B65G49/07; H01L21/3065; H01L21/31
Domestic Patent References:
| JP2008532287A | ||||
| JP7297262A | ||||
| JP7176601A | ||||
| JP5259258A | ||||
| JP2010135424A | ||||
| JP3116197U | ||||
| JP2007527625A |
Attorney, Agent or Firm:
Yoshiaki Anzai
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