Title:
A method and a device for substrate washing and dryness
Document Type and Number:
Japanese Patent JP6118451
Kind Code:
B2
Inventors:
Fonseca, Carlos, A
Kakashi, michael, a
Kakashi, michael, a
Application Number:
JP2016502730A
Publication Date:
April 19, 2017
Filing Date:
March 14, 2014
Export Citation:
Assignee:
東京エレクトロン株式会社
International Classes:
H01L21/304; H01L21/027
Domestic Patent References:
| JP2013026568A | ||||
| JP2009252855A | ||||
| JP2008124429A | ||||
| JP2004095805A | ||||
| JP2010045389A | ||||
| JP2012114409A | ||||
| JP2004111857A | ||||
| JP2008060103A |
Attorney, Agent or Firm:
Tadashige Ito
Tadahiko Ito
Shinsuke Onuki
Tadahiko Ito
Shinsuke Onuki