Title:
Methods and equipment to save energy while increasing transfer speed in a vacuum coating plant
Document Type and Number:
Japanese Patent JP6353602
Kind Code:
B2
Abstract:
Disclosed are an apparatus and a method for saving energy while increasing the conveying speed in vacuum coating plants consisting of a series of sputtering segments (3) and gas separation segments (2) along with a continuous substrate plane (1). Said apparatus has the following features: a) each of the sputtering segments (3) consists of a tank tub (12) inside which a conveying device (11) is located; the flange (6) of the tank is positioned in the immediate vicinity above the substrate plane (1); a cathode bearing block (5), along with targets (8) and gas inlet ducts (10), is located in the tank cover (4) in the immediate vicinity of the substrate together with splash guards (9); b) in the region of the substrate plane (1), the gas separation segments (2) are provided with a tunnel cover (14) that extends along the entire length of the gas separation segment (2); c) sputtering segments (3) and/or gas separation segments (2) are evacuated using one or more vacuum pumps (15), and the air pumped in said process is trapped in an air reservoir (25) having an adjustable volume.
Inventors:
Crydeter, Gerd
Krish, Thomas
Fukowski-, Jorku
Gervel, Olaf
Krish, Thomas
Fukowski-, Jorku
Gervel, Olaf
Application Number:
JP2017504378A
Publication Date:
July 04, 2018
Filing Date:
August 05, 2015
Export Citation:
Assignee:
Grenzebach Maschinenbau GmbH
International Classes:
C23C14/56; C23C14/34
Domestic Patent References:
| JP200281857A | ||||
| JP5311403A |
Attorney, Agent or Firm:
Yasuo Itaya
Katsumi Taguchi
Shinichi Mizuta
Itaya Masayuki
Katsumi Taguchi
Shinichi Mizuta
Itaya Masayuki