Title:
高周波誘導加熱炉のホットゾーン構造及びホットゾーン構造を用いた酸化物単結晶の育成方法
Document Type and Number:
Japanese Patent JP6878865
Kind Code:
B2
Abstract:
PROBLEM TO BE SOLVED: To provide a hot zone structure capable of maintaining for a long term, a temperature environment suitable for rearing an oxide single crystal by improving a life time of a refractory used at a rearing time of the oxide single crystal.SOLUTION: A hot zone structure 2 of a high-frequency induction heating furnace has an inside heat insulation cylinder 21 as a cylindrical refractory enclosing a rearing space of an oxide single crystal on an upper part of a crucible 10, and an inner lid 23 as a cover-shaped refractory for lidding the inside heat insulation cylinder 21. The inner lid 23 is constituted of an upper stage cyclic refractory 23U and a lower stage cyclic refractory 23L.SELECTED DRAWING: Figure 2
Inventors:
Kajigaya Tomio
Application Number:
JP2016241564A
Publication Date:
June 02, 2021
Filing Date:
December 13, 2016
Export Citation:
Assignee:
Sumitomo Metal Mining Co., Ltd.
International Classes:
C30B15/00; C30B29/30; F27B14/08; F27D1/18
Domestic Patent References:
| JP2001316195A | ||||
| JP2002226299A | ||||
| JP2008266078A | ||||
| JP2013177280A |
Foreign References:
| KR1019960005521B1 |
Attorney, Agent or Firm:
Tadashige Ito
Tadahiko Ito
Tadahiko Ito