Title:
投影対物器械を製造する方法及びこの方法によって製造される投影対物器械
Document Type and Number:
Japanese Patent JP5959021
Kind Code:
B2
Abstract:
PROBLEM TO BE SOLVED: To provide a method for manufacturing a projection objective appliance and the projection objective appliance manufactured by this method.SOLUTION: A method for manufacturing a projection objective appliance includes a step of defining an initial design for a projection objective appliance and a step of optimizing the design using a merit function having a plurality of merit function components AB, IRRAD EFP, each of which reflects a specific quality parameter. One of that merit function components defines a maximum irradiance requirement requiring that a normalized effective irradiance value representing an effective irradiance AB, IRRAD EFF normalized to an effective irradiance in an image surface of the projection objective appliance does not exceed a predefined irradiance threshold value IRR TV on each optical surface of the projection objective appliance except for a last optical surface directly adjacent to an image surface of the projection objective appliance. Optical surfaces positioned within caustic regions and/or critically small effective sub-apertures on optical surfaces are thereby systematically avoided.
Inventors:
Feltman Heiko
Gruner Tralf
Eple alexander
Gruner Tralf
Eple alexander
Application Number:
JP2014117797A
Publication Date:
August 02, 2016
Filing Date:
June 06, 2014
Export Citation:
Assignee:
Carl Zeiss SGM Gaehha
International Classes:
G02B17/08; G02B13/18; G03F7/20; H01L21/027
Domestic Patent References:
| JP11223769A | ||||
| JP344609A | ||||
| JP2006220914A | ||||
| JP2005301054A | ||||
| JP5559543B2 |
Foreign References:
| WO2005111689A2 |
Attorney, Agent or Firm:
Sadao Kumakura
Fumiaki Otsuka
Takaki Nishijima
Hiroyuki Suda
Hiroshi Uesugi
Fumiaki Otsuka
Takaki Nishijima
Hiroyuki Suda
Hiroshi Uesugi