Title:
薄膜の製造方法及びこれに用いられる化学気相成長用原料組成物
Document Type and Number:
Japanese Patent JP4107924
Kind Code:
B2
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| JPH07333208 | COLUMN PACKING AGENT FOR LIQUID CHROMATOGRAPHY |
Inventors:
Kazuhisa Onozawa
Atsushi Yoshinaka
Naoki Yamada
Hiroki Sato
Shinichi Tanaka
Atsushi Yoshinaka
Naoki Yamada
Hiroki Sato
Shinichi Tanaka
Application Number:
JP2002265816A
Publication Date:
June 25, 2008
Filing Date:
September 11, 2002
Export Citation:
Assignee:
ADEKA CORPORATION
International Classes:
C07F7/04; C23C16/18; C23C16/30; C23C16/40; H01L21/312; H01L21/316
Domestic Patent References:
| JP6321824A | ||||
| JP2002069641A | ||||
| JP2002246388A |
Attorney, Agent or Firm:
Osamu Hatori