Title:
The microscope which adopted adaptable cathode luminescence detection system and such system
Document Type and Number:
Japanese Patent JP6208198
Kind Code:
B2
Abstract:
The invention relates to a cathodoluminescence detection system comprising: a collecting optic (112) collecting light radiation (108) from a sample illuminated by a beam of charged particles and reflecting said radiation (108) onto analysis means, said collecting optic (112) being placed in a chamber, called a vacuum chamber, wherein the pressure is below atmospheric pressure; and means (316) for adapting the light radiation, placed downstream of the collecting optic (112) and designed to adapt said light radiation (108) at the inlet of the analysis means. Said system is characterized in that all or part of the adapting means (316) is placed in an environment where the pressure is higher than the pressure in said vacuum chamber.
Inventors:
Cotiac, Matthew
Zagonell, Lewis, Fernando
Tonce, Marcel
Mazucco, Stefano
Zagonell, Lewis, Fernando
Tonce, Marcel
Mazucco, Stefano
Application Number:
JP2015211726A
Publication Date:
October 04, 2017
Filing Date:
October 28, 2015
Export Citation:
Assignee:
CENTRE NATIONAL DE LA RECHERCHE SCIENTIFIQUE
UNIVERSITE PARIS-SUD 11
UNIVERSITE PARIS-SUD 11
International Classes:
H01J37/244; G01N21/62; H01J37/18; H01J37/20; H01J37/252; H01J37/26; H01J37/28
Domestic Patent References:
| JP61004348U | ||||
| JP10090181A | ||||
| JP2004526962A | ||||
| JP2004279328A |
Foreign References:
| US4900932 | ||||
| US5724131 |
Attorney, Agent or Firm:
Keiichi Ota
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