Title:
A minute electricity mechanical device, a manufacturing method for the same, and computer program products
Document Type and Number:
Japanese Patent JP6023089
Kind Code:
B2
Abstract:
In an embodiment, a micro-electromechanical device can include a substrate, a beam, and an isolation joint. The beam can be suspended relative to a surface of the substrate. The isolation joint can be between a first portion and a second portion of the beam, and can have a non-linear shape. In another embodiment, a micro-electromechanical device can include a substrate, a beam, and an isolation joint. The beam can be suspended relative to a surface of the substrate. The isolation joint can be between a first portion and a second portion of the beam. The isolation joint can have a first portion, a second portion, and a bridge portion between the first portion and the second portion. The first and second portions of the isolation joint can each have a seam and a void, while the bridge portion can be solid.
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Inventors:
Blackmar, Charles, W.
Adams, Scott, Gee.
Hocking, Andrew, S.
Lynch, Christine, Jay.
Shah, Ashish, A.
Adams, Scott, Gee.
Hocking, Andrew, S.
Lynch, Christine, Jay.
Shah, Ashish, A.
Application Number:
JP2013553638A
Publication Date:
November 09, 2016
Filing Date:
February 13, 2012
Export Citation:
Assignee:
Kyonix, Inc.
International Classes:
B81B7/02; B81C1/00
Domestic Patent References:
| JP2008173719A | ||||
| JP2009290155A | ||||
| JP2007290073A |
Foreign References:
| US7728339 | ||||
| US20030224565 | ||||
| US20050026321 |
Attorney, Agent or Firm:
Yoshiyuki Inaba
Toshifumi Onuki
Toshifumi Onuki