Title:
ミラーユニット
Document Type and Number:
Japanese Patent JP7112986
Kind Code:
B2
Abstract:
An optical module 1 includes: a mirror unit 2 including a base 21, a movable mirror 22, and a fixed mirror 16; a beam splitter unit 3 that is disposed on one side of the mirror unit 2 in a Z-axis direction; a light incident unit 4 that causes measurement light L0 to be incident to the beam splitter unit 3; a first light detector 6 that is disposed on the one side of the beam splitter unit 3 in the Z-axis direction, and detects interference light L1 of measurement light which is emitted from the beam splitter unit 3; a support 9 to which the mirror unit 2 is attached; a first support structure 11 that supports the beam splitter unit 3; and a second support structure 12 that is attached to the support 9 and supports the first light detector 6.
Inventors:
Satoshi Suzuki
Kyousuke Minatoya
Tatsuya Sugimoto
Yutaka Kuramoto
Katsumi Shibayama
Nobuo Hosokawa
Hirokazu Yamamoto
Takuo Koyama
Kyousuke Minatoya
Tatsuya Sugimoto
Yutaka Kuramoto
Katsumi Shibayama
Nobuo Hosokawa
Hirokazu Yamamoto
Takuo Koyama
Application Number:
JP2019081262A
Publication Date:
August 04, 2022
Filing Date:
April 22, 2019
Export Citation:
Assignee:
Hamamatsu Photonics Co., Ltd.
International Classes:
G02B26/00; B81B3/00; G01J3/45; G02B26/06
Domestic Patent References:
| JP2010512548A | ||||
| JP2014048366A | ||||
| JP2005055670A | ||||
| JP2005309099A | ||||
| JP2012098505A | ||||
| JP2015143868A | ||||
| JP2012042739A | ||||
| JP2012145675A |
Foreign References:
| US20120085728 |
Attorney, Agent or Firm:
Yoshiki Hasegawa
Yoshiki Kuroki
Kenichi Shibayama
Yoshiki Kuroki
Kenichi Shibayama
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