Title:
A multi-charged particle beam drawing apparatus and a multi-charged particle beam drawing method
Document Type and Number:
Japanese Patent JP6042158
Kind Code:
B2
Abstract:
A multi charged particle beam writing apparatus according to one aspect of the present invention includes a first aperture member to form multiple beams, a blanker array provided with a plurality of blankers which respectively perform blanking deflection of a corresponding beam in the multiple beams, a first electromagnetic lens and a second electromagnetic lens arranged between the first aperture member and the blanker array, a second aperture member arranged between the first electromagnetic lens and the second electromagnetic lens and at a position of a convergence point of the multiple beams and configured to restrict passage of charged particles deviated from the convergence point, and a third aperture member to block each beam which was deflected to be in a beam off state by the plurality of blankers.
Inventors:
Munehiro Ogasawara
Application Number:
JP2012219474A
Publication Date:
December 14, 2016
Filing Date:
October 01, 2012
Export Citation:
Assignee:
New Flare Technology Co., Ltd.
International Classes:
H01L21/027; G03F7/20; H01J37/09; H01J37/18; H01J37/305
Domestic Patent References:
| JP11317357A | ||||
| JP2003202661A | ||||
| JP2010153858A | ||||
| JP2006019435A | ||||
| JP6069111A | ||||
| JP2006261342A | ||||
| JP2012243803A |
Attorney, Agent or Firm:
Tetsuma Ikegami
Akira Sudo
Mitsuyuki Matsuyama
Akira Sudo
Mitsuyuki Matsuyama