Title:
窒化物系化合物半導体素子およびその製造方法
Document Type and Number:
Japanese Patent JP5548905
Kind Code:
B2
Inventors:
Masayuki Iwami
Application Number:
JP2010192554A
Publication Date:
July 16, 2014
Filing Date:
August 30, 2010
Export Citation:
Assignee:
The Furukawa Electric Co., Ltd.
International Classes:
H01L29/812; H01L21/205; H01L21/338; H01L29/47; H01L29/778; H01L29/872
Attorney, Agent or Firm:
Hiroaki Sakai