Title:
脂環構造を有する新規テトラヒドロフラン化合物
Document Type and Number:
Japanese Patent JP3997387
Kind Code:
B2
Abstract:
Tetrahydrofuran compounds of formula (1) wherein the broken line represents a single bond, a divalent organic group, or a structure in which the alicyclic structure in the form of norbornene or tetracyclo[4.4.0.12,5.17,10]dodecene and the tetrahydrofuran cyclic structure share one or two constituent carbon atoms, and k is 0 or 1 are novel and useful as monomers to form base resins for use in chemically amplified resist compositions adapted for micropatterning lithography
Inventors:
Tsuyoshi Kanao
Koji Hasegawa
Takeshi Watanabe
Koji Hasegawa
Takeshi Watanabe
Application Number:
JP2001109755A
Publication Date:
October 24, 2007
Filing Date:
April 09, 2001
Export Citation:
Assignee:
Shin-Etsu Chemical Co., Ltd.
International Classes:
C07D307/06; C07D307/12; C07D307/93; C07D307/94; C08F32/00; C08G61/08; G03F7/004
Domestic Patent References:
| JP52053850A | ||||
| JP2000159758A |
Other References:
HARADA, T. et al.,J. Org. Chem.,米国,1989年 5月26日,Vol.54/No.11,p.2599-2605
LIU, H.-J. et al.,Heterocycles,日本,1978年,Vol.11,p.261-265
LIU, H.-J. et al.,Heterocycles,日本,1978年,Vol.11,p.261-265
Attorney, Agent or Firm:
Takashi Kojima
Yuko Nishikawa
Yuko Nishikawa